Chemical heater and etch method are important terms that must be found by people and businesses in the semiconductor industry. On this page, I am sharing for the types of chemical heaters employed in the soaked process system as well as the silicon nitride etch process.

Different kinds of chemical water heater

Quartz supports Gas Heaters -- a system that is designed to match the growing need heated huge purity air. It has the capacity of warming a wide range of fumes including: Phosphate (NH3), Helium (He), Argon (Ar), Hydrogen (H2), Arsine (AsH3), Hydrogen Bromide (HBr), Boron Trichloride (BCl3), Hydrogen Chloride (HCl), Carbon Dioxide (CO2), Nitrogen (N2), Carbon Monoxide (CO), Chlorine (Cl2), Nitrous Oxide (N2O), Oxygen (O2), Disilane (Si2H6), Sulfur Dioxide (SO2), Methylsilane (SiH3CH3)

Quartz - Very smooth Heater -- used in the semiconductor sector and its common application comes with recirculation hook, either simply because the sole brain source or maybe a combination of a fabulous heated quartz tank.

SiC - HF & KOH Heater -- designed for home heating HF (hydrofluoric acide), KOH (potassium hydroxide), and other excessive PH chemistries. It uses large purity Silicon Carbide (SiC) as a heat up transfer information because it possesses excellent heat transfer residences and eliminates the risk of toxins due to Teflon breakdown.
Interesting Facts about the Silicon Nitride Etch practice

To be able to reach the greatest etch rates and best selectivity, the phosphoric acid need to have the highest relation of water at certain temperature. Intended for as long as the boil issue is looked after, the etching rate in both Si3N4 and SiO2 can be accurately controlled.

Maintaining a boiling solution is among the challenges in the etch method. When phosphoric acid is usually heated, the solution will begin boiling away. When temperatures is not retained, it influences the decoration process given that acid concentration increase. Rainy etch firms use a normal temperature controlled to maintain temperatures, but the water concentration is going to decrease and may change the etch rates. Being a solution, soaked etch process engineers use water addition system.

A fabulous technology named closed "reflux" system is applied and it is developed above the shower using distilling collar and a top - this is certainly to minimize liquid addition.

The chemical gases and high temperatures that Nitride Etch reservoir tanks are put through are seen to decrease bathroom life substantially by fighting the sealant that prevents liquid and fumes via entering the heater region. This problem have been addressed by using aquaseal.

Quartz Nitride Reflux system is engineered to address the initial needs of this silicon nitride etch method. Hydrobromic Acid gives the subsequent benefits to customers: approach uniformity, lot-to-lot repeatability, avoids stratification.